Place of Origin : china
Brand Name : Fitow
Certification : ISO9001-2008
Model Number : fm20150402
MOQ : 10pcs
Price : usd3-65/pc
Packaging Details : wooden case
Delivery Time : 12days
Payment Terms : T/T
Supply Ability : 1000pc/month
Ro5200 Tantalum Disc, tantalum disk ,tantalum target
1.Specifications
Material: Tantalum sputtering target, Tantalum target
Grade: RO5200, RO5400, RO5252, RO5255
circular &rectangular targe
We are factory specializing in the manufacture and export Tantalum and Niobium prodcut .
we can provide many forms as follows
Tantalum sputtering target, Tantalum target
Material: R05200, R05400,
circular targets: Diameter 25mm up to 400mm x Thickness 3mm up to 28mm
rectangular targets: Thickness 1mm up to 12.7mm x Width up to 600mm x Length up to 2000mm
Purity: >=99.95% or 99.99%
Table 1: technology parameter
Grade |
3N, 3N5, 4N, with Ta 99.99%min |
Recrystallization |
95%min |
Grain size |
ASTM 4 or finer |
Surface finish |
16Rms max. or Ra 0.4 ( RMS64 or better) |
Flatness |
0.1mm or 0.15% max |
Tolerance |
+/-0.010" on all dimensions |
Table 1. Chemical composition:
Chemistry % |
|||||||||||||
Designation |
Chief component |
Impurities maxmium |
|||||||||||
Ta |
Nb |
Fe |
Si |
Ni |
W |
Mo |
Ti |
Nb |
O |
C |
H |
N |
|
Ta1 |
Remainder |
|
0.004 |
0.003 |
0.002 |
0.004 |
0.004 |
0.002 |
0.03 |
0.015 |
0.004 |
0.0015 |
0.002 |
Ta2 |
Remainder |
|
0.01 |
0.01 |
0.005 |
0.02 |
0.02 |
0.005 |
0.08 |
0.02 |
0.01 |
0.0015 |
0.01 |
TaNb3 |
Remainder |
3.5 |
0.01 |
0.01 |
0.005 |
0.02 |
0.02 |
0.005 |
|
0.02 |
0.01 |
0.0015 |
0.01 |
TaNb20 |
Remainder |
17.023.0 |
0.01 |
0.01 |
0.005 |
0.02 |
0.02 |
0.005 |
|
| |||
Tantalum ring / Tantalum crucible / Tantalum target Images |